Browsing Faculty of Natural and Agricultural Sciences by Subject "Ion sputtering deposition"
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Use of ion-assisted sputtering technique for producing photocatalytic titanium dioxide thin films: influence of thermal treatments on structural and activity properties based on the decomposition of stearic acid
(Elsevier, 2018)Titanium dioxide thin films were deposited by the reactive ion-assisted sputtering method from titanium targets at various partial pressures and deposition parameters. The films were deposited onto substrates at temperatures ...